✦ LIBER ✦
Test structure measuring inter- and intralayer coupling capacitance of interconnection with subfemtofarad resolution
✍ Scribed by Kunikiyo, T.; Watanabe, T.; Kanamoto, T.; Asazato, H.; Shirota, M.; Eikyu, K.; Ajioka, Y.; Makino, H.; Ishikawa, K.; Iwade, S.; Inoue, Y.
- Book ID
- 114617423
- Publisher
- IEEE
- Year
- 2004
- Tongue
- English
- Weight
- 657 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0018-9383
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