Template Patterning: Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning (Adv. Mater. 23/2012)

✍ Scribed by He Yi; Xin-Yu Bao; Jie Zhang; Christopher Bencher; Li-Wen Chang; Xiangyu Chen; Richard Tiberio; James Conway; Huixiong Dai; Yongmei Chen; Subhasish Mitra; H.-S. Philip Wong

• Book ID: 111992558
• Publisher: John Wiley and Sons
• Year: 2012
• Tongue: English
• Weight: 582 KB
• Volume: 24
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.201290134