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Temperature variation in liquid infiltration and defiltration in a MCM41

✍ Scribed by Han, Aijie; Lu, Weiyi; Punyamurtula, Venkata K.; Kim, Taewan; Qiao, Yu

Book ID
120053682
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
553 KB
Volume
105
Category
Article
ISSN
0021-8979

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