Temperature stability of a piezoresistive MEMS resonator including self-heating

✍ Scribed by Bendida, S.; Koning, J.J.; Bontemps, J.J.M.; van Beek, J.T.M.; Wu, D.; van Gils, M.A.J.; Nath, S.

• Book ID: 104057998
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 651 KB
• Volume: 48
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/j.microrel.2008.06.049

✦ Synopsis

Temperature stability of a piezoresistive 1.5 lm thin SOI resonator at 74 MHz is presented. As compared to capacitive resonators the self-heating due to the bias current causes a further decrease of the resonator frequency, in addition to the well-known dependency on ambient temperature. The interpretation of the resonance frequency as a device temperature is not obvious anymore under self-heating due to the inhomogeneous temperature distribution.