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Temperature parameter in hydrogen passivation of multicrystalline silicon solar cells

โœ Scribed by J.C. Muller; Vu Thuong Quat; P. Siffert; H. Amzil; A. Barhdadi; N. M'Gafad

Publisher
Elsevier Science
Year
1988
Weight
933 KB
Volume
25
Category
Article
ISSN
0379-6787

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Using a remote-plasma technique as opposed to the conventional direct-plasma technique, signiยฎcant progress has been obtained at ISFH in the area of lowtemperature surface passivation of p-type crystalline silicon solar cells by means of silicon nitride (SiN) ยฎlms fabricated at 350ยฑ4008C in a plasma