Temperature effects on the fabrication of optical channels in planar GaAs/AlGaAs waveguides using MeV ions

✍ Scribed by T Taylor; D Ila; R.L Zimmerman; J.C Cochrane; P.R Ashley; D.B Poker; D.K Hensley

• Book ID: 114170143
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 250 KB
• Volume: 141
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(98)00119-0