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Temperature dependence of the optical properties of ion-beam sputtered ZrN films

โœ Scribed by Larijani, M. M.; Kiani, M.; Jafari-Khamse, E.; Fathollahi, V.

Book ID
125345050
Publisher
Springer
Year
2014
Tongue
English
Weight
593 KB
Volume
117
Category
Article
ISSN
1432-0630

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## Abstract Zirconium nitride (ZrN) coatings were prepared on Si (100) by single ion beam sputtering in N~2~ and Ar mixture at different substrate temperatures. Structure and morphology of the ZrN coatings were analyzed using Xโ€ray diffraction and atomic force microscopy. Rutherford backscattering