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Temperature compensation in integrated CMOS-MEMS scanning probe microscopes

✍ Scribed by Sarkar, N.; Trainor, K.; Mansour, R.R.

Book ID: 114461710
Publisher: The Institution of Engineering and Technology
Year: 2012
Tongue: English
Weight: 463 KB
Volume: 7
Category: Article
ISSN: 1750-0443
DOI: 10.1049/mnl.2011.0470

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