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Temperature characteristics of the substrate for Lamb wave type elastic wave devices

✍ Scribed by Yasuhiko Nakagawa; Mitsuyoshi Shigeda; Kazumasa Shibata; Shouji Kakio


Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
347 KB
Volume
89
Category
Article
ISSN
8756-663X

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✦ Synopsis


Abstract

Plate wave (Lamb wave) propagation in an extremely thin quartz substrate is analyzed. A cut angle is sought that exhibits an ultrastable temperature dependence of the frequency characteristics so that the frequency changes little with temperature. Highly stable temperature characteristics of the frequency indicating second‐ and third‐order curves are obtained. Theoretical and experimental investigations of the temperature characteristics of the frequency of Lamb waves propagating in an AT‐cut quartz substrate indicate excellent agreement between the two, confirming that the reliability of the results of the present analysis is high. © 2006 Wiley Periodicals, Inc. Electron Comm Jpn Pt 2, 89(8): 9–15, 2006; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/ecjb.20262