Temperature and humidity effects on the quality factor of a silicon lateral rotary micro-resonator in atmospheric air

✍ Scribed by E. Hosseinian; P.-O. Theillet; O.N. Pierron

• Book ID: 119368275
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 969 KB
• Volume: 189
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/j.sna.2012.09.020