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TEM investigation of silicon carbide wafers with reduced micropipe density

✍ Scribed by S. E. Saddow; T. E. Schattner; M. Shamsuzzoha; S. V. Rendakova; V. A. Dmitriev


Book ID
107452432
Publisher
Springer US
Year
2000
Tongue
English
Weight
183 KB
Volume
29
Category
Article
ISSN
0361-5235

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