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TEM analysis of an additional metal-rich component at the C49–C54 transformation in Ti/Si thin films capped with TiN

✍ Scribed by I. Matko; B. Chenevier; O. Chaix-Pluchery; R. Madar; F. La Via


Book ID
108388392
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
920 KB
Volume
408
Category
Article
ISSN
0040-6090

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