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Techniques for filtering graphite macroparticles in the cathodic vacuum arc deposition of tetrahedral amorphous carbon films

✍ Scribed by Hakovirta, M.; Tiainen, V.-M.; Pekko, P.


Book ID
120627546
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
700 KB
Volume
8
Category
Article
ISSN
0925-9635

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