TCAD simulation of ion implantation test for controlling quality of GaAs substrates used for fabricating implanted devices

✍ Scribed by Deepak; Peter A. Blakey; Karl Johnson

• Book ID: 107452654
• Publisher: Springer US
• Year: 2001
• Tongue: English
• Weight: 197 KB
• Volume: 30
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-001-0102-3