✦ LIBER ✦
Target to intermediate target sputtering technique for the preparation of continuously composed alloys and for doping of amorphous silicon
✍ Scribed by G. Bilger; G.H. Bauer
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 559 KB
- Volume
- 119
- Category
- Article
- ISSN
- 0040-6090
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