Tapping mode SPM local oxidation nanolithography with sub-10 nm resolution

✍ Scribed by Nishimura, S; Ogino, T; Takemura, Y; Shirakashi, J

• Book ID: 120002262
• Publisher: Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 706 KB
• Volume: 100
• Category: Article
• ISSN: 1742-6588
• DOI: 10.1088/1742-6596/100/5/052021