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Talbot-SNOM method for non-contact evaluation of high-density gratings

✍ Scribed by Hongxin Luo; Changhe Zhou; Hua Zou; Yunqing Lu

Book ID: 103871135
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 246 KB
Volume: 248
Category: Article
ISSN: 0030-4018
DOI: 10.1016/j.optcom.2004.12.004

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