✦ LIBER ✦
Tailoring silicon oxide film properties by tuning the laser beam-to-substrate distance in ArF laser-induced chemical vapor deposition
✍ Scribed by T. Szörényi; P. González; E. Garcá; J. Pou; D. Fernández; J. Serra; B. León; M. Pérez-Amor
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 312 KB
- Volume
- 241
- Category
- Article
- ISSN
- 0040-6090
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