✦ LIBER ✦
Tailored Star Block Copolymer Architecture for High Performance Chemically Amplified Resists
✍ Scribed by Florian Wieberger; Christian Neuber; Christopher K. Ober; Hans-Werner Schmidt
- Book ID
- 115548654
- Publisher
- John Wiley and Sons
- Year
- 2012
- Tongue
- English
- Weight
- 726 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0935-9648
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