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Tactile microgripper for automated handling of microparts

✍ Scribed by Georg Greitmann; Rudolf A Buser


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
693 KB
Volume
53
Category
Article
ISSN
0924-4247

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AFM-study of sticking effects for microp
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The purpose of this study was to find a coating for a silicon microgripper, reducing sticking effects for handling microparts under ambient or vacuum conditions. We used an AFM-tip and different surfaces as a model system to study the interactions between workpiece and gripper. The main problem unde