AFM-study of sticking effects for microp
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B VΓΆgeli; H von KΓ€nel
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Article
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2000
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Elsevier Science
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English
β 177 KB
The purpose of this study was to find a coating for a silicon microgripper, reducing sticking effects for handling microparts under ambient or vacuum conditions. We used an AFM-tip and different surfaces as a model system to study the interactions between workpiece and gripper. The main problem unde