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ta-C deposition simulations: Film properties and time-resolved dynamics of film formation

✍ Scribed by Jäger, H.; Belov, A.

Book ID: 111937328
Publisher: The American Physical Society
Year: 2003
Tongue: English
Weight: 772 KB
Volume: 68
Category: Article
ISSN: 1098-0121
DOI: 10.1103/physrevb.68.024201

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