TA-A2 sheet resistivity reduction in polycrystalline silicon by pulsed laser and CW laser annealing

✍ Scribed by Shibata, T.; Lee, K.F.; Gibbons, J.F.

• Book ID: 114593201
• Publisher: IEEE
• Year: 1979
• Tongue: English
• Weight: 152 KB
• Volume: 26
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1979.19714