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Synthetic study and material applications for a positive photo resist of the acrylic series

✍ Scribed by Tzong-Shing Cheng; Mei-Hui Wu; Wei-Shyang Weng; Hui Chen


Book ID
117357133
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
269 KB
Volume
57
Category
Article
ISSN
0167-577X

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## Abstract Two methods used for determining the elastic modulus (E) and hardness (H) of a materialβ€”the original version of the well‐known Oliver‐Pharr Method, OOPM, and a variant of it called the Modified Slopes Method, MSMβ€”were critically compared. The nanoindentation test results, of indenter lo