Synthesis ofc-Axis Inclined AlN Films in an Off-Center System for Shear Wave Devices

✍ Scribed by Juan Xiong; Hao-Shuang Gu; Wen Wu; Ming-Zhe Hu; Peng-Fei Du; Hong Xie

• Book ID: 107457316
• Publisher: Springer US
• Year: 2011
• Tongue: English
• Weight: 446 KB
• Volume: 40
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-011-1662-5