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Synthesis of succinylated poly(4-hydroxystyrene) and its application for negative-tone photoresist

✍ Scribed by Hyejin Cho; Junyoung Kim; Prashant Patil; Jun Young Kim; Tae-Ho Kim

Publisher: John Wiley and Sons
Year: 2006
Tongue: English
Weight: 447 KB
Volume: 103
Category: Article
ISSN: 0021-8995
DOI: 10.1002/app.24979

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