✦ LIBER ✦
Synthesis of Si–C–N coatings by thermal Plasmajet chemical vapour deposition applying liquid precursors
✍ Scribed by Johannes Wilden; Andreas Wank; Marcus Asmann; Joachim V. R. Heberlein; Maher I. Boulos; Francois Gitzhofer
- Publisher
- John Wiley and Sons
- Year
- 2001
- Tongue
- English
- Weight
- 472 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0268-2605
- DOI
- 10.1002/aoc.239
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