Synthesis of metastable group-IV alloy semiconductors by ion implantation and ion-beam-induced epitaxial crystallization

✍ Scribed by N. Kobayashi; M. Hasegawa; N. Hayashi; H. Katsumata; Y. Makita; H. Shibata; S. Uekusa

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 441 KB
• Volume: 100-101
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(96)00327-3