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Synthesis of epitaxial γAl2O3thin films by thermal oxidation of AlN/sapphire(0001) thin films

✍ Scribed by H.C. Kang; S.H. Seo; H.W. Jang; D.H. Kim; J.W. Kim; D.Y. Noh


Book ID
106018621
Publisher
Springer
Year
2003
Tongue
English
Weight
301 KB
Volume
77
Category
Article
ISSN
1432-0630

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