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Synthesis of BN films by the plasma CVD with various solids: BH3NH3, H3BO3 and NaBH4

✍ Scribed by H. Saitoh; T. Hirose; Y. Hirotsu; Y. Ichinose

Book ID: 107930040
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 360 KB
Volume: 39-40
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(89)90060-1

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