✦ LIBER ✦
Synthesis of alkali-soluble silicone resin suitable for resist material in microlithography
✍ Scribed by Hiroshi Ban; Akinobu Tanaka; Yoshio Kawai; Saburo Imamura
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 538 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0032-3861
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