✦ LIBER ✦
Synthesis of a photo-patternable cross-linked epoxy system containing photodegradable carbonate units for deep UV lithography
✍ Scribed by Geun Huh; Ki-Ok Kwon; Sang-Ho Cha; Sang-Woong Yoon; Moo Young Lee; Jong-Chan Lee
- Publisher
- John Wiley and Sons
- Year
- 2009
- Tongue
- English
- Weight
- 358 KB
- Volume
- 114
- Category
- Article
- ISSN
- 0021-8995
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