Synthesis and structure of smooth, superhard TiN/SiNx multilayer coatings with an equiaxed microstructure

✍ Scribed by Yu-Hsia Chen; Kitty W Lee; Wen-An Chiou; Yip-Wah Chung; Leon M Keer

• Book ID: 108422944
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 477 KB
• Volume: 146-147
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(01)01390-1