✦ LIBER ✦
Synthesis and structure characterization of low dielectric constant MSQ films by using octamethyl cyclotetrasiloxane (D4) as a porosity promotion agent
✍ Scribed by Yin, Guiqin; Yuan, Qianghua; Ning, Zhaoyuan
- Book ID
- 122056838
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 610 KB
- Volume
- 96
- Category
- Article
- ISSN
- 0042-207X
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