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Synthesis and radical polymerization of pyrocarbonate-functionalized monomers: application to positive-tone photoresists

✍ Scribed by Stefan Vansteenkiste; Gert Matthijs; Etienne Schacht; Frans De Schrijver; Marc Van Damme; Joan Vermeersch

Publisher
John Wiley and Sons
Year
1999
Tongue
English
Weight
58 KB
Volume
20
Category
Article
ISSN
1022-1336

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