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Synthesis and polymerization of 3-(t-butoxycarbonyl)-1-vinylcaprolactam and application as deep UV resists

✍ Scribed by Jin-Baek Kim; Min-Ho Jung; Kyeong-Ho Chang

Book ID: 106002118
Publisher: Springer
Year: 1997
Tongue: English
Weight: 499 KB
Volume: 38
Category: Article
ISSN: 0170-0839
DOI: 10.1007/s002890050044

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