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Synthesis and photoluminescence studies of silicon nanoparticles embedded in silicon compound films

✍ Scribed by Huang, Rao ;Ma, Li-bo ;Ye, Jian-ping ;Wang, Yong-qian ;Cao, Ze-xian


Book ID
107378882
Publisher
Higher Education Press and Springer
Year
2008
Tongue
English
Weight
532 KB
Volume
3
Category
Article
ISSN
1673-3487

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## Abstract Hydrogenated amorphous and nanocrystalline silicon thin films deposited by hot wire (HW) and radio‐frequency plasma‐enhanced chemical vapour deposition (RF‐PECVD) were erbium‐implanted. Their pre‐implantation structural properties and post‐implantation optical properties were studied an