✦ LIBER ✦
Synthesis and ellipsometric characterization of insulating low permittivity SiO2 layers by remote-PECVD using radio-frequency glow discharge
✍ Scribed by F.N Dultsev; A.P Solowjev
- Book ID
- 108388491
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 138 KB
- Volume
- 419
- Category
- Article
- ISSN
- 0040-6090
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