Synthesis and characterization of YSZ thin film electrolytes
β Scribed by C.C. Chen; M.M. Nasrallah; H.U. Anderson
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 786 KB
- Volume
- 70-71
- Category
- Article
- ISSN
- 0167-2738
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Amorphous oxide and oxynitride lithium electrolyte thin films were synthesized by r.f. magnetron sputtering of lithium silicates and lithium phosphates in Ar, Ar+O x, Ar+N" or N 2 . The composition, structure, and electrical properties of the films were characterized using ion and electron beam, X-r
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