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Synthesis and characterization of ultrafine Si powders from laser induced SiH4 gas reactions

✍ Scribed by Y.-L. Li; Y. Liang; K.-S. Xiao; F. Zheng; Z.-Q. Hu


Book ID
116169791
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
635 KB
Volume
5
Category
Article
ISSN
0965-9773

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Laser Synthesis and Characterization of
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We presented both laser synthesis and characterization of ultrafine nanometric (12 to 20 nm diameter) Si/C/N powders starting from NH 3 , SiH 4 and C 2 H 2 gas mixture, using a continuous-wave CO 2 laser. The main parameters affecting this process are: the reactant flow ratio R F NH3 =F SiH4 , the C