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Synthesis and characterization of cubic boron nitride films: substrate bias and ion flux effects

✍ Scribed by Li, Quan; Zhou, Z.F.; Lee, C.S.; Lee, S.T.; Bello, I.


Book ID
123104688
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
474 KB
Volume
10
Category
Article
ISSN
0925-9635

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