Synchrotron radiation-stimulated photochemical reaction and its application to semiconductor processes

✍ Scribed by Tsuneo Urisu; Jun-Ichi Takahashi; Yuichi Utsumi; Housei Akazawa

• Publisher: John Wiley and Sons
• Year: 1991
• Tongue: English
• Weight: 1011 KB
• Volume: 5
• Category: Article
• ISSN: 0268-2605
• DOI: 10.1002/aoc.590050405