✦ LIBER ✦
Synchrotron radiation excited etching of silicon surface studied by velocity distribution measurements of desorbed species
✍ Scribed by Haruhiko Ohashi; Kosuke Shobatake
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 274 KB
- Volume
- 80
- Category
- Article
- ISSN
- 0368-2048
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