๐”– Bobbio Scriptorium
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Symposium on spectrochemical analysis for trace elements

Publisher
Elsevier Science
Year
1957
Weight
106 KB
Volume
10
Category
Article
ISSN
0371-1951

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VPD/TXRF analysis of trace elements on a
VPD/TXRF analysis of trace elements on a silicon wafer
โœ Motoyuki Yamagami; Masahiro Nonoguchi; Takashi Yamada; Takashi Shoji; Tadashi Ut ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 86 KB

A combination of vapor-phase decomposition (VPD) and total reflection x-ray fluorescence (TXRF) was used for the trace analysis of light elements (Na and Al) and transition metals (Fe, Ni, Cu, and Zn). TXRF measurement using the W Ma line was conducted for the high-sensitivity analysis of Na and Al.