Symmetric Vertical-Channel Nickel-Salicided Poly-Si Thin-Film Transistors With Self-Aligned Oxide Overetching Structures

✍ Scribed by Yi-Hong Wu; Po-Yi Kuo; Yi-Hsien Lu; Yi-Hsuan Chen; Tsung-Yu Chiang; Kuan-Ti Wang; Li-Chen Yen; Tien-Sheng Chao

• Book ID: 114620486
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 967 KB
• Volume: 58
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2011.2142312