Swelling or erosion on the surface of patterned GaN damaged by heavy ion implantation

✍ Scribed by Yuan Gao; Chune Lan; Jianming Xue; Sha Yan; Yugang Wang; Fujun Xu; Bo Shen; Yanwen Zhang

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 939 KB
• Volume: 268
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2010.05.090