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Swarm data of O − , NO − , He + , N 2 O + , and ions in N 2 O, He and N 2 O–He mixtures for PECVD applications

✍ Scribed by Yousfi, M; Hennad, A; Benhenni, M

Book ID
120002926
Publisher
Institute of Physics
Year
2007
Tongue
English
Weight
854 KB
Volume
40
Category
Article
ISSN
0022-3727

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✍ J. Lemaire; R. Marx 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 432 KB

The charge transfer reaction of He+ with N20 produces vibrationally excited N:(X) ions. The relaxation processes occurring after formation of the NC (X, u" ) ions have been investigated. Charge transfer with N,O is the main relaxation mechanism and its rate does not vary much with the internal energ