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Surface voltage induced by electron trapping and interface charge buildup in silicon oxynitride thin films

✍ Scribed by A.J. de Castro; M. Fernández; J.L. Sacedón


Book ID
118365715
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
489 KB
Volume
269-270
Category
Article
ISSN
0039-6028

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