✦ LIBER ✦
Surface topography of planar PMMA grating structures produced by the UV-laser based phase mask method
✍ Scribed by C. Wochnowski; S. Metev; F. Vollertsen
- Publisher
- Springer-Verlag
- Year
- 2006
- Tongue
- English
- Weight
- 440 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0946-7076
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