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Surface structure analysis of metal adsorbed Si(1 1 1) surfaces by Patterson function with LEED I–V curves

✍ Scribed by T. Kuzushita; A. Murata; A. Yamamoto; T. Urano


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
362 KB
Volume
254
Category
Article
ISSN
0169-4332

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To clarify the oxide growth mechanism on strained Si surfaces, the thermal oxidation reaction kinetics of an Si 1-x C x (x 0.1) alloy layer with a c(4 × 4) structure grown on Si(0 0 1) surfaces by carbonization with ethylene 636 • C was investigated using RHEED combined with AES. Upon staring the ox