Surface-sensitive x-ray fluorescence and diffraction analysis with grazing-exit geometry
✍ Scribed by T. Noma; K. Takada; A. Iida
- Publisher
- John Wiley and Sons
- Year
- 1999
- Tongue
- English
- Weight
- 271 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0049-8246
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✦ Synopsis
Surface-sensitive x-ray analysis techniques are explained. Using grazing-exit geometry, structural information about a sample surface could be obtained by measuring the angular distribution of x-ray fluorescence or x-ray diffraction intensity. A model based on the reciprocity theorem was used and its correctness was confirmed by achieving good agreement with experimental results. The interference of fluorescent x-rays in layered thin films was observed. The refraction effect in x-ray diffraction was detected. These phenomena can be utilized in thin-film characterization. Use of a synchrotron x-ray microbeam in combination with the grazing-exit condition permitted surface analysis with lateral spatial resolution. Layered thin films were characterized. The principle of this method and results obtained are presented.